SOLUTIONS
Semiconductor
Detailed Introduction
Detailed Introduction

INOCO focuses on providing efficient and reliable filtration solutions for the semiconductor industry. Our products are widely applied in various stages of semiconductor manufacturing, dedicated to ensuring the cleanliness of the production environment, the purity of process gases, and the stable operation of equipment.

1. Ultrapure Water Preparation
Semiconductor manufacturing requires ultrapure water (UPW) for wafer cleaning and chemical solution preparation. INOCO’s ultrapure water filters can effectively remove particulates, ions, and organic matter from water, ensuring water quality meets semiconductor-grade standards.

2. Process Gas Purification
Process gases (such as nitrogen, argon, hydrogen, etc.) used in semiconductor manufacturing require extremely high purity. INOCO’s gas filters remove particulates, moisture, and oil from gases, ensuring gas purity meets semiconductor process requirements, and are suitable for processes such as CVD, etching, and photolithography.

3. Chemical Solution Filtration
During wafer cleaning and etching processes, the purity of chemical solutions directly affects product quality. INOCO’s chemical solution filters remove particulates and colloids from solutions, ensuring process stability and yield.

4. CMP Slurry Filtration
Chemical mechanical polishing (CMP) is one of the key processes in semiconductor manufacturing. INOCO’s CMP slurry filters effectively remove particulates from polishing slurry, preventing wafer surface scratches and improving polishing quality.

5. Tail Gas Treatment
Tail gas generated during semiconductor manufacturing processes contains acidic, alkaline, or organic pollutants. INOCO’s tail gas filters efficiently remove harmful substances, ensuring emissions comply with environmental standards.



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Contact Info: +86-510-82621388、88302966 、82603252、83782787
Contact Address: 5th Floor, No. 28, Huaxia Kaixuan Building, Erquan Middle Road, Xishan District, Wuxi City
Contact Address: No. 6, Lingzhi Road, Zhongxiang Village Industrial Zone, Heqiao Town, Yixing City
24-hour hotline: +86-15852561666
Email Address: zhaokunnian@inoco.cn
Website: www.inocofilter.com www.inococn.com
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